Abstract:We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process.

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Rib and strip chalcogenide waveguides based on Ge-Sb-Se radio-frequency sputtered films

Mitigating waveguide loss in Ge-Sb-Se chalcogenide glass photonics

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Nonlinear Optical Properties of Integrated GeSbS Chalcogenide Waveguides

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators

Optical investigation of chalcogenide glass for on-chip integrated devices

Linear and third order nonlinear optical properties of GeSbS chalcogenide integrated waveguides

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Low-loss compact chalcogenide microresonators for efficient stimulated Brillouin lasers

Third Order Nonlinear Properties of GeSbS Chalcogenide Waveguides

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Magnetron-sputtered and Thermal-Evaporated Low-Loss Sb-Se Phase-Change Films in Non-Volatile Integrated Photonics

Single-Polarization Waveguiding by Low-Index Strips on the Surface of Chalcogenide Glass Film

Octave spanning and flat-top supercontinuum generation in standard foundry-compatible process-made Ge–Sb–Se chalcogenide glass waveguide

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Chalcogenide glass based integrated photonics

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods