Abstract:Organic polymer materials are widely credited with extreme versatility for thin film device processing. However, they generally lack the high refractive indices of inorganic semiconductors essential for tight optical confinement in planar integrated photonic circuits. Inorganic–organic hybrid photonic systems overcome these limits by combining both types of materials, although such hybrid integration remains challenging given the vastly different properties of the two types of materials. In this paper, a new approach is used to realize inorganic–organic hybrid photonics using chalcogenide glass (ChG) materials. Known as an amorphous semiconductor, the glass possesses high refractive indices, and can be prepared in a thin film form through solution deposition and patterned via direct thermal nanoimprinting, processing methods traditionally exclusive to polymer materials only. Sub‐micrometer waveguides, microring resonators, and diffraction gratings fabricated from solution processed (SP) ChG films can be monolithically integrated with organic polymer substrates to create mechanically flexible, high‐index‐contrast photonic devices. The resonators exhibit a high quality factor (Q‐factor) of 80 000 near 1550 nm wavelength. Free‐standing, flexible ChG gratings whose diffraction properties can be readily tailored by conformal integration on nonplanar surfaces are also demonstrated.

Single-Polarization Waveguiding by Low-Index Strips on the Surface of Chalcogenide Glass Film

Wave Guiding by Low Refractive-Index Strips on Surfaces of Chalcogenide Glass Thin Films

Rib and strip chalcogenide waveguides based on Ge-Sb-Se radio-frequency sputtered films

High-Quality Chalcogenide Glass Waveguide Fabrication by Hot Melt Smoothing and Micro-Trench Filling

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Nonlinear Optical Properties of Chalcogenide Glass Waveguides Fabricated by Hot Melt Smoothing and Micro-Trench Filling

Reverse Ridge/Slot Chalcogenide Glass Waveguide with Ultrabroadband Flat and Low Dispersion

Chalcogenide Glass Microfibers for Mid-Infrared Optics

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

Nonlinear Optical Properties of Integrated GeSbS Chalcogenide Waveguides

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators

Planar Chalcogenide Glass Mid-Infrared Photonics

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

Monolithic Chalcogenide Glass Waveguide Integrated Interband Cascaded Laser

Mid-infrared As2Se3 Chalcogenide Glass-on-silicon Waveguides

Ultra Broadband Flat Dispersion Tailoring on Reversed-Rib Chalcogenide Glass Waveguide

Mitigating waveguide loss in Ge-Sb-Se chalcogenide glass photonics

High-Efficiency and Polarization-Insensitive Grating Couplers on Thin-Film Lithium Niobate Waveguides

Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides