Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

yi zou,hongtao lin,lan li,sylvain danto,j david musgraves,kathleen richardson,juejun hu
DOI: https://doi.org/10.1109/PHOSST.2013.6614542
2013-01-01
Abstract:We demonstrated thermal nanoimprint fabrication of photonic devices in chalcogenide glass films on both semiconductor and nonconventional plastic substrates. A high micro-ring intrinsic quality factor of 3 × 105 is achieved at 1550 nm wavelength.
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