High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates
Yi Zou,Danning Zhang,Hongtao Lin,Lan Li,Loise Moreel,Jie Zhou,Qingyang Du,Okechukwu Ogbuu,Sylvain Danto,J. David Musgraves,Kathleen Richardson,Kevin D. Dobson,Robert Birkmire,Juejun Hu
DOI: https://doi.org/10.1002/adom.201300489
IF: 9
2014-02-14
Advanced Optical Materials
Abstract:This paper reports a versatile technique for the fabrication of high‐index‐contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low‐temperature chalcogenide glass film deposition and resist‐free single‐step thermal nanoimprint to process low‐loss, sub‐micron single‐mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra‐high quality factor of 4 × 105 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub‐micrometer nanoimprinting of chalcogenide glass films on non‐planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high‐index‐contrast devices on a wide array of unconventional substrates. High‐index‐contrast photonic structures are fabricated on both silicon and unconventional plastic substrates in composition‐engineered chalcogenide glass (ChG) thin films, using a roll‐to‐roll and backend‐compatible nanoimprint technique. Imprinted optical resonators exhibit a record quality factor of 4 × 105 near 1550 nm (wavelengths), the highest value reported in ChG microring resonators.
materials science, multidisciplinary,optics