Abstract:By providing an effective way to leverage nonlinear phenomena in chip-scale, high-Q optical resonators have induced the recent advances of on-chip photonics represented by micro-combs and ultra-narrow linewidth lasers. These achievements mainly relying on Si, SiO$_{2}$, and Si$_{3}$N$_{4}$ are expected to be further improved by introducing new materials having higher nonlinearity. However, establishing fabrication processes to shape a new material into the resonator geometries having extremely smooth surfaces on a chip has been a challenging task. Here we describe a universal method to implement high-Q resonators with any materials which can be deposited in high vacuum. This approach, by which light-guiding cores having surface roughness in molecular-scale is automatically defined along the prepatterned platform structures during the deposition, is verified with As$_{2}$S$_{3}$, a typical chalcogenide glass of high-nonlinearity. The Q-factor of the developed resonator is 14.4 million approaching the loss of chalcogenide fibers, which is measured in newly proposed tunable waveguide-to-resonator coupling scheme with high ideality. Lasing by stimulated Brillouin process is demonstrated with threshold power of 0.53 mW which is 100 times lower than the previous record based on chalcogenide glasses. This approach paves the way for bringing various materials of distinguished virtues to the on-chip domain while keeping the loss performance comparable to that of bulk form.

Fabrication and Characterization of On-Chip Optical Nonlinear Chalcogenide Nanofiber Devices

On-Chip Integration of Optical Nanofibers and Nanowires

Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

Engineered Raman Lasing in Photonic Integrated Chalcogenide Microresonators

A hybrid chalcogenide-on-silicon platform for nonlinear photonics

Demonstration of High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators

Chalcogenide glass based integrated photonics

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Universal light-guiding geometry for high-nonlinear resonators having molecular-scale roughness

Chalcogenide Glass Microfibers for Mid-Infrared Optics