Abstract:Photonic crystal (PhC) cavities have drawn plenty of attentions during the past several decades for the advantages of ultra-high Q factor and small mode volume. PhC cavities have various applications such as quantum information processing, low threshold lasers, optomechanics, and nonlinear optics. PhC cavities based on silicon material have been heavily investigated due to their compatibility with complementary metal-oxide-semiconductor (CMOS) technology, small feature size and low cost. However, apart from the advantage of high Q factor, silicon based PhC cavities suffer from the drawbacks of high insertion loss because of the mode mismatch with fiber and relatively low sensitivity especially for the sensing application. On the other hand, silicon dioxide (silica) waveguide experience relatively smaller loss and owns a similar refractive index to numerous liquid materials to be detected, which will leads to high sensitivity for a silica based PhC cavity sensor. In this paper, we propose a high Q factor (Q = 15500) silica based PhC nanobeam cavity with high sensitivity (the wavelength shift per refractive index unit (RIU) is S = 338 nm/RIU) at the telecommunication wavelength (1550 nm). Since the refractive index contrast for silica waveguide is low for the realization of the photonic bandgaps, it is essential to utilize a silica waveguide suspended in free space. The PhC nanobeam cavity is then formed by etching a series of elliptical holes, whose dimensions linearly decrease from the center to both ends, directly into the silica waveguide. For the sake of high transmission on-resonance wavelength while maintaining high Q factor, it's important to etch partly into the waveguide, which results in a low-refractive-index perturbation structure. The calculated on-resonance transmission is about 0.26. The novel proposed PhC nanobeam cavity shows a sensitivity 3 times larger than the one based on silicon counterparts and outperforms other low index-contrast PhC cavities by a higher on-resonance transmission. Such a structure can also be used in spectrally filtering system and nonlinear optics.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High-Q Photonic Crystal Nanobeam Cavities on Silicon

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

High-Q Side-Coupled Semi-2d-Photonic Crystal Cavity

High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

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Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

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Analysis of Electrooptic Modulator With 1-D Slotted Photonic Crystal Nanobeam Cavity

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Efficient side-coupling configuration for photonic crystal nanobeam cavities with micro-ring resonators

Tailoring Mode Splitting and Degeneracy in Silicon Triply Resonant Nanobeam Cavities

Ultracompact Channel Add-Drop Filter Based on Single Multimode Nanobeam Photonic Crystal Cavity

Scalable High Q-factor Fano Resonance from Air-Mode Photonic Crystal Nanobeam Cavity

Design and Fabrication of High-Quality Two-Dimensional Silicon-Based Photonic Crystal Optical Cavity with Integrated Waveguides

Encapsulated silicon nitride nanobeam cavity for nanophotonics using layered materials

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High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures