Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges

Nathan Carlie,J David Musgraves,Bogdan Zdyrko,Igor Luzinov,Juejun Hu,Vivek Singh,Anu Agarwal,Lionel C Kimerling,Antonio Canciamilla,Francesco Morichetti,Andrea Melloni,Kathleen Richardson
DOI: https://doi.org/10.1364/OE.18.026728
2010-12-06
Abstract:In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
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