Abstract:Organic polymer materials are widely credited with extreme versatility for thin film device processing. However, they generally lack the high refractive indices of inorganic semiconductors essential for tight optical confinement in planar integrated photonic circuits. Inorganic–organic hybrid photonic systems overcome these limits by combining both types of materials, although such hybrid integration remains challenging given the vastly different properties of the two types of materials. In this paper, a new approach is used to realize inorganic–organic hybrid photonics using chalcogenide glass (ChG) materials. Known as an amorphous semiconductor, the glass possesses high refractive indices, and can be prepared in a thin film form through solution deposition and patterned via direct thermal nanoimprinting, processing methods traditionally exclusive to polymer materials only. Sub‐micrometer waveguides, microring resonators, and diffraction gratings fabricated from solution processed (SP) ChG films can be monolithically integrated with organic polymer substrates to create mechanically flexible, high‐index‐contrast photonic devices. The resonators exhibit a high quality factor (Q‐factor) of 80 000 near 1550 nm wavelength. Free‐standing, flexible ChG gratings whose diffraction properties can be readily tailored by conformal integration on nonplanar surfaces are also demonstrated.

Wave Guiding by Low Refractive-Index Strips on Surfaces of Chalcogenide Glass Thin Films

Single-Polarization Waveguiding by Low-Index Strips on the Surface of Chalcogenide Glass Film

Rib and strip chalcogenide waveguides based on Ge-Sb-Se radio-frequency sputtered films

High-Quality Chalcogenide Glass Waveguide Fabrication by Hot Melt Smoothing and Micro-Trench Filling

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Nonlinear Optical Properties of Chalcogenide Glass Waveguides Fabricated by Hot Melt Smoothing and Micro-Trench Filling

Chalcogenide Glass Microfibers for Mid-Infrared Optics

Chalcogenide Coatings of Ge_15Sb_20S_65 and Te_20As_30Se_50

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

Nonlinear Optical Properties of Integrated GeSbS Chalcogenide Waveguides

Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates

Fabrication and characterization of femtosecond laser written waveguides in chalcogenide glass

Mid-infrared As2Se3 Chalcogenide Glass-on-silicon Waveguides

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators

Optical investigation of chalcogenide glass for on-chip integrated devices

Planar Chalcogenide Glass Mid-Infrared Photonics

Reverse Ridge/Slot Chalcogenide Glass Waveguide with Ultrabroadband Flat and Low Dispersion

Fabrication and Characterization of Ge 20 Sb 15 Se 65 Chalcogenide Glass Rib Waveguides for Telecommunication Wavelengths

Cubic Phase MgxZn1−xO Thin Films for Optical Waveguides