High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

Guanyu Li,Pei Liu,Xiaoshun Jiang,Chao Yang,Jiyang Ma,Hongya Wu,Min Xiao

DOI: https://doi.org/10.1364/prj.3.000279

IF: 7.6

2015-01-01

Photonics Research

Abstract:We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°, 70°, and 79° with optical quality factors of 2.4 × 107, 8.1 × 106, 5.9 × 106, and 7.4 × 106, respectively, from ～80 μmdiameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 106 with a wedge angle of 74°.