Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

High-Q Silicon Nitride Few-Mode Microdisk Resonators

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Silicon Micro-Cavities And Their System Applications

Quality Factor of Silicon-on-insulator Integrated Optical Ring Resonator

Analysis Theory of a High Q Microdisk Based on Material of InP and Its Application

Slope Tunable Fano Resonances in Asymmetric Embedded Microring Resonators

Dual-band Optical Filter Based on a Single Microring Resonator Embedded with Nanoholes

Greater Than One Billion Q Factor for On-Chip Microresonators

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Diffractive Broadband Coupling into High-Q Resonant Cavities

High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

Fabrication of SiO 2 Microdisk Optical Resonator

High-Q and highly reproducible microdisks and microlasers.

SOI-based Radial-Contour-mode Micromechanical Disk Resonator

Ultrahigh Q SOI Ring Resonator With Strip Waveguide