Abstract:Optical resonators with high quality (Q) factor can restrict light in a small mode volume for a long time, greatly enhancing the interaction between light and matter, and becoming an important component with great potential in integrated optical devices. Focusing on the silicon nitride material platform, which is currently widely used in the field of integrated nonlinear optics, in order to solve the problem of large scattering loss in the large size on-chip silicon nitride microring resonator caused by the stitching error, the surface roughness and other factors, a series of fabrication process improvements were made to improve the quality factor of the large size silicon nitride microring resonator. The results show that the scattering loss of the silicon nitride waveguide can be effectively reduced by thin film redeposition process, and the intrinsic Q of the large size silicon nitride microring resonator with a radius of 560 μm is increased by 26% on average. Thanks to the improved Q of the large size microring resonator, the frequency comb with the repetition rate of 40 GHz is realized in the on-chip silicon nitride microring resonator.

Quality Factor of Silicon-on-insulator Integrated Optical Ring Resonator

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Optimal Design of Ring Resonator in Silica Optical Waveguide

Optical Ring-Resonator Modulator Based on 0.8 Μm CMOS Technology

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Novel structure of passive ring waveguide resonator on silicon substrate

Optical Signal Processing in SOI Waveguide Devices

Integrated-optic tenth-order micro-ring filters in silicon-on-insulator

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Silicon Micro-Cavities And Their System Applications

Optical Frequency Comb in Silicon Nitride Microresonator(invited)

Greater Than One Billion Q Factor for On-Chip Microresonators

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Integrated Reconfigurable Microring Based Silicon Wdm Receiver for On-Chip Optical Interconnect

Study of Silicon-on-glass Waveguides

SOI Multi-ring Cascade Optic Resonator Filters