Integrated-optic tenth-order micro-ring filters in silicon-on-insulator

Shubin Yan,Xiaoqian Wang,KeZhen Ma,AnFu Zhang,Chenyang Xue,Wendong Zhang

DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.991

2013-01-01

Key Engineering Materials

Abstract:In the paper, it demonstrates highly integrated tenth-order filters in silicon-on-insulator (SOI). The micro-ring resonators have a small radius of 5 mu m and a very large free spectral range similar to 18nm at 1.55 mu m communication band. For through port responses, the grating and the high-order optic filters with ten coupled micro-ring resonators are designed and demonstrated, and grating responding well matches with the experiment resonators. Devices are patterned with electron-beam lithography (EBL). And 2 mu m SiO2 layer is covered on the silicon waveguide, thus reducing the propagation loss in micro-ring resonators.