Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Shubin Yan,Minghui Li,Liang Luo,Kezhen Ma,Chenyang Xue,Wendong Zhang
DOI: https://doi.org/10.3390/mi6010151
IF: 3.4
2015-01-01
Micromachines
Abstract:Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 mu m) with different coupling styles, concentric, straight, and butterfly, are prepared by the micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields.
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