Abstract:On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear integrated photonic platforms still feature propagation losses orders of magnitude higher than in standard optical fiber. The tight confinement and high index contrast of integrated waveguides make them highly susceptible to fabrication induced surface roughness. Therefore, microresonators with ultra-high Q factors are, to date, only attainable in polished bulk crystalline, or chemically etched silica based devices, that pose however challenges for full photonic integration. Here, we demonstrate the fabrication of silicon nitride ($\mathrm{Si_3N_4}$) waveguides with unprecedentedly smooth sidewalls and tight confinement with record low propagation losses. This is achieved by combining the photonic Damascene process with a novel reflow process, which reduces etching roughness, while sufficiently preserving dimensional accuracy. This leads to previously unattainable \emph{mean} microresonator Q factors larger than $5\times10^6$ for tightly confining waveguides with anomalous dispersion. Via systematic process step variation and two independent characterization techniques we differentiate the scattering and absorption loss contributions, and reveal metal impurity related absorption to be an important loss origin. Although such impurities are known to limit optical fibers, this is the first time they are identified, and play a tangible role, in absorption of integrated microresonators. Taken together, our work provides new insights in the origins of propagation losses in $\mathrm{Si_3N_4}$ waveguides and provides the technological basis for integrated nonlinear photonics in the ultra-high Q regime.

Coupling ideality of integrated planar high-Q microresonators

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Diffractive Broadband Coupling into High-Q Resonant Cavities

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Coupling Ideality of Standing-Wave Supermode Microresonators

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Design and Characterization of Q-enhanced Silicon Nitride Racetrack Micro-Resonators

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Probing the loss origins of ultra-smooth $\mathrm{Si_3N_4}$ integrated photonic waveguides

Low-loss Millimeter-wave Resonators with an Improved Coupling Structure

Integrated waveguide coupled ultralow-loss multimode waveguides based on silicon nitride resonators

Exploiting Ultralow Loss Multimode Waveguides for Broadband Frequency Combs

Perpendicular Coupler for Standing Wave Excitation and Wavelength Selection in High-Q Silicon Microresonators

A fully integrated high-Q Whispering-Gallery Wedge Resonator

Universal coupler for bulk whispering gallery mode resonators based on silicon subwavelength grating waveguides

Integrated Ultra-High-Q Optical Resonator

Effects of Nonlinear Loss in High-Q Si Ring Resonators for Narrow-Linewidth III-V/Si Heterogeneously Integrated Tunable Lasers.

422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

Optical microsphere resonators: optimal coupling to high-Q whispering gallery modes

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators