Abstract:Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an ultra-high-Q silicon-nitride (Si3N4) racetrack resonator with uniform multi-mode Si3N4 photonic waveguides. It consists of two multi-mode straight waveguides connected by two multi-mode waveguide bends (MWBs). In particular, the MWBs are based on modified Euler curves, and a multi-mode straight waveguide directional coupler is used for the fundamental mode coupling and avoid exciting higher-order modes in the racetrack. In this way, the fundamental mode is excited and propagates in the multi-mode racetrack resonator with ultra-low loss. Meanwhile, it helps to achieve a compact 180° bend to reduce the chip footprint. In this paper, the propagation loss of the fundamental mode is significantly reduced with standard fabrication process by broadening the waveguides width to as wide as 3{\mu}m. Results show that an ultra-high-Q resonator with an intrinsic Q of TE mode is 4.57*10^7, and the corresponding propagation loss of the waveguide is only 1.80 dB/m. To the best of our knowledge, this is the highest Q value of the ring resonator with only 2.226 mm ring length reported so far. The proposed ultra-high-Q Si3N4 resonator can be used to microwave photonic filters and optoelectronic oscillators with large operation bandwidth.

Integrated waveguide coupled ultralow-loss multimode waveguides based on silicon nitride resonators

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

300-Nm-thick, Ultralow-Loss Silicon Nitride Photonic Integrated Circuits by 8-In. Foundry Production

Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2?μm wave band

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Novel structure of passive ring waveguide resonator on silicon substrate

Ultra-high-Q racetrack microring based on silicon-nitride

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Exploiting Ultralow Loss Multimode Waveguides for Broadband Frequency Combs

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Silicon Micro-Cavities And Their System Applications

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Ultracompact Wavelength-Selective Silicon-Based Plasmonic Components

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform