Abstract:Silicon photonics has gained great success mainly due to the promise of realizing compact devices in high volume through the low-cost foundry model. It is burgeoning from laboratory research into commercial production endeavors such as datacom and telecom. However, it is unsuitable for some emerging applications which require coverage across the visible or mid infrared (mid-IR) wavelength bands. It is desirable to introduce other wideband materials through heterogeneous integration, while keeping the integration compatible with wafer-scale fabrication processes on silicon substrates. We discuss the properties of silicon-family materials including silicon, silicon nitride, and silica, and other non-group IV materials such as metal oxide, tantalum pentoxide, lithium niobate, aluminum nitride, gallium nitride, barium titanate, piezoelectric lead zirconate titanate, and 2D materials. Typical examples of devices using these materials on silicon platform are provided. We then introduce a general fabrication method and low-loss process treatment for photonic devices on the silicon platform. From an applications viewpoint, we focus on three new areas requiring integration: sensing, optical comb generation, and quantum information processing. Finally, we conclude with perspectives on how new materials and integration methods can address previously unattainable wavelength bands while maintaining the advantages of silicon, thus showing great potential for future widespread applications.

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

$2-\Mu$ M Wavelength Grating Coupler, Bent Waveguide, and Tunable Microring on Silicon Photonic MPW

Wafer-Scale Demonstration of Low-Loss (~0.43 dB/cm), High-Bandwidth (> 38 GHz), Silicon Photonics Platform Operating at the C-Band

High-speed Silicon Modulators for the 2 Μm Wavelength Band

Silicon-based CMOS Photonic Devices Using Carrier Dispersion Effect

Si-Cmos Compatible Materials and Devices for Mid-Ir Microphotonics

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Fabrication of Silicon Photonic Devices by Utilizing Industrial CMOS Technology

High-performance Silicon PIN Diode Switches in the 2-Μm Wave Band.

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Flexible Passive Integrated Photonic Devices with Superior Optical and Mechanical Performance.

High-Performance Passive Silicon Photonic Waveguide Devices: Progress and Challenges

Development of Silicon Photonic Devices for Optical Interconnects

Study of Silicon Photonics Based on Standard CMOS Foundry

Low-Loss Silicon Platform for Broadband Mid-Infrared Photonics

Ultra-wideband integrated photonic devices on silicon platform: from visible to mid-IR

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit