Study of Silicon Photonics Based on Standard CMOS Foundry

Jianyi Yang,Yong Zhao,Chen Qiu,Wanjun Wang,Guomin Jiang,Yinlei Hao,Xiaoqing Jiang
DOI: https://doi.org/10.1117/12.870406
2010-01-01
Abstract:Silicon photonics can found applications in optical interconnects and optical signal processing. Recent years, silicon photonics was developed rapidly. In this paper, we report our research work on silicon photonics. Based on the standard CMOS foundry, we studied the silicon waveguides and related photonic components.
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