Resonance- and Coupling-Tunable Silicon Ring Resonator Based on Low-Voltage MEMS with Large FSR

Ye Lu,Yinpeng Hu,Huan Li,Daoxin Dai
DOI: https://doi.org/10.1109/oecc56963.2023.10209653
2023-01-01
Abstract:Reconfigurable silicon ring resonators are critical components in integrated photonics and have significant applications in various fields, including optical switching and microwave processing. In this study, we propose a novel design of resonance and linewidth tunable all-pass ring filters, which exhibit a free spectral range (FSR) of 6 nm, a loaded quality factor (Q) of 5116, a bias voltage lower than 12V, and a resonance tuning range of 1.2 nm. The proposed device operates based on micro-electro-mechanical systems (MEMS) technology and is implemented using silicon photonics.
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