SOI Multi-ring Cascade Optic Resonator Filters
WANG Xiao-qian,MA Ke-zhen,ZHAO Yu,FENG Xin-lin,XUE Chen-yang,ZHANG Wen-dong,YAN Shu-bin
DOI: https://doi.org/10.3788/fgxb20133405.0645
2013-01-01
Chinese Journal of Luminescence
Abstract:Based on Silicon on insulator(SOI) material and mature Micro-electro-mechanical systems(MEMS) technology,an optical waveguide cascaded resonator filter with high integration and small size was processed.The light field transmission characteristics and spectral response characteristics of multi-ring cascaded cavity were theoretically analyzed.Moreover,the relationship between different number of cascaded micro-ring and resonance spectrum roll-off verticality was also proved in experiment.When the waveguide width is 450 nm and radius is 5 μm,the experimental results show that-3 dB response bandwidth of the 1st order,2nd order and 10th order filters spectral are 0.313,0.279 and 0.239 nm,which are consistent with the theoretical results.That means more cascaded rings result in flatter top resonance and higher roll-off vertical degree.Micro-ring and racetrack-shaped cascaded resonator filters were fabricated and the properties of transmission spectrum was also tested.