Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Fabrication of SiO2 Microdisk Optical Resonator

Microfiber Resonator in Polymer Matrix.

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Fabrication of Optical Cavities with Femtosecond Laser Pulses

A New Route for Fabricating Polymer Optical Microcavities.

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Research on Silica Microdisk by Wet-etching

Silica-based microcavity fabricated by wet etching

High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Focused ion beam polishing based optimization of high-Q silica microdisk resonators

High-Q and highly reproducible microdisks and microlasers.

Subwavelength Silicon Microcavities

Optimal Design of Ring Resonator in Silica Optical Waveguide

Fabrication and Excitation of Single Whispering Gallery Mode Microdisk Resonator

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Fabrication of silicon-on-glass waveguides

Vertically Stacked Silicon Nitride Coupled Microdisk Resonators