Abstract:We designed and fabricated a silicon nitride (Si3N4) micro ring resonator filter coupled with a straight waveguide grating coupler in the visible wavelength range. The key parameters of the micro ring resonators, including the waveguide crosssection size, bending radius, coupling spacing as well as the linewidth and period of the grating coupler, are optimized to obtain an resonant output in the range of 730~780nm. Then, Si3N4 micro-ring resonators with different parameters are patterned by electron beam lithography (EBL), inductively coupled plasma etching (ICP) and other processes. At last, the filtered light peaks and the free spectral range of the micro ring resonator are characterized, which are found to be tunable by varying the cross section of the waveguide and the radius of the ring. In addition, by replacing SiO2 with Polyvinyl alcohol (PVA) resin as the upper cladding of the device, the flatness of the top surface of the device can be further improved with a simplified process. Our study lays a foundation for the heterogeneous integration of different materials with COMS compatible silicon nitride platform.

Vertically Stacked Silicon Nitride Coupled Microdisk Resonators

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