Abstract:Photonic integrated circuits are widely used in applications such as telecommunications and data-centre interconnects 1,2,3,4,5 . However, in optical systems such as microwave synthesizers 6 , optical gyroscopes 7 and atomic clocks 8 , photonic integrated circuits are still considered inferior solutions despite their advantages in size, weight, power consumption and cost. Such high-precision and highly coherent applications favour ultralow-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format—that is, on a single chip—for photonic integrated circuits to replace bulk optics and fibres. There are two major issues preventing the realization of such envisioned photonic integrated circuits: the high phase noise of semiconductor lasers and the difficulty of integrating optical isolators directly on-chip. Here we challenge this convention by leveraging three-dimensional integration that results in ultralow-noise lasers with isolator-free operation for silicon photonics. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III–V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5 decibels per metre are demonstrated. Consequently, the demonstrated photonic integrated circuit enters a regime that gives rise to ultralow-noise lasers and microwave synthesizers without the need for optical isolators, owing to the ultrahigh-quality-factor cavity. Such photonic integrated circuits also offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. The three-dimensional integration on ultralow-loss photonic integrated circuits thus marks a critical step towards complex systems and networks on silicon.

Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates

On-Chip Integration of Optical Nanofibers and Nanowires

Selective Out‐of‐Plane Optical Coupling between Vertical and Planar Microrings in a 3D Configuration

Silicon Coupled Cavities As a Flexible Platform for Integrated Nonlinear Photonics

Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Dual-Layer Cross-Coupled Tunable Resonator System in a Three-Dimensional Si3N4 Photonic Integration Platform

Photonic Integration with Si-Wire Waveguides for Photonic Networks

Optical Via for Silicon Photonic 3D-Integrations

Optical Signal Processing In Silicon Nano-Waveguides

Nanophotonic devices on thin buried oxide Silicon-On-Insulator substrates

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Flexible integration of free-standing nanowires into silicon photonics

3D nano-printing coupler for silicon nitride suspended waveguide

3D integration enables ultralow-noise isolator-free lasers in silicon photonics

Nanoimprint of a 3D structure on an optical fiber for light wavefront manipulation

Technology for high density optical integration on silicon

Vertical engineering for large stimulated Brillouin scattering in unreleased silicon-based waveguides

Simulation Study on 3D Heterogeneous Photonic Integration with Vertical Microring Coupler

Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics