Abstract:Various crystalline silicon carbide (SiC) polytypes are emerging as promising photonic materials due to their wide bandgap energies and nonlinear optical properties. However, their wafer forms cannot readily provide a refractive index contrast for optical confinement in the SiC layer, which makes it difficult to realize a SiC-based integrated photonic platform. In this paper, we demonstrate a 3C-SiC-on-insulator (3C-SiCoI)-based integrated photonic platform by transferring the epitaxial 3C-SiC layer from a silicon die to a borosilicate glass substrate using anodic bonding. By fine-tuning the fabrication process, we demonstrated nearly 100% area transferring die-to-wafer bonding. We fabricated waveguide-coupled microring resonators using sulfur hexafluoride (SF6)-based dry etching and demonstrated a moderate loaded quality (Q) factor of 1.4 × 105. We experimentally excluded the existence of the photorefractive effect in this platform at sub-milliwatt on-chip input optical power levels. This 3C-SiCoI platform is promising for applications, including large-scale integration of linear, nonlinear and quantum photonics.

High-Confinement, High-Q Microring Resonators on Silicon Carbide-On-Insulator (Sicoi)

High-quality Factor, High-Confinement Microring Resonators in 4H-Silicon Carbide-on-insulator

Fabrication of High-Q, High-Confinement 4H-Sic Microring Resonators by Surface Roughness Reduction

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Silicon Micro-Cavities And Their System Applications

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

4H-Sic Microring Resonators for Nonlinear Integrated Photonics.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

On-chip Microwave Signal Generation Based on a Silicon Microring Modulator.

4H–SiC microring resonators—Opportunities for nonlinear integrated optics

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Investigation Of Nano Sic Resonator

Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

A 3C-SiC-on-Insulator-Based Integrated Photonic Platform Using an Anodic Bonding Process with Glass Substrates

Light Confinement in A Low-Refraction-Index Microcavity Bonded on A Silicon Substrate

Investigation of the electro-optic effect in high-$Q$ 4H-SiC microresonators

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip