Abstract:Recent advancements in integrated soliton microcombs open the route to a wide range of chip-based communication, sensing, and metrology applications. The technology translation from laboratory demonstrations to real-world applications requires the fabrication process of photonics chips to be fully CMOS-compatible, such that the manufacturing can take advantage of the ongoing evolution of semiconductor technology at reduced cost and with high volume. Silicon nitride has become the leading CMOS platform for integrated soliton devices, however, it is an insulator and lacks intrinsic second-order nonlinearity for electro-optic modulation. Other materials have emerged such as AlN, LiNbO3, AlGaAs and GaP that exhibit simultaneous second- and third-order nonlinearities. Here, we show that silicon carbide (SiC) -- already commercially deployed in nearly ubiquitous electrical power devices such as RF electronics, MOSFET, and MEMS due to its wide bandgap properties, excellent mechanical properties, piezoelectricity and chemical inertia -- is a new competitive CMOS-compatible platform for nonlinear photonics. High-quality-factor microresonators (Q = 4 × 106) are fabricated on 4H-SiC-on-insulator thin films, where a single soliton microcomb is generated. In addition, we observe wide spectral translation of chaotic microcombs from near-infrared to visible due to the second-order nonlinearity of SiC. Our work highlights the prospects of SiC for future low-loss integrated nonlinear and quantum photonics that could harness electro-opto-mechanical interactions on a monolithic platform.

High-quality Factor, High-Confinement Microring Resonators in 4H-Silicon Carbide-on-insulator

4H–SiC microring resonators—Opportunities for nonlinear integrated optics

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Silicon Micro-Cavities And Their System Applications

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Optical Frequency Comb in Silicon Nitride Microresonator(invited)

Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices

Effective Third-Order Nonlinearities in Metallic Refractory Titanium Nitride Thin Films

Optical parametric oscillation in silicon carbide nanophotonics

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

High-Q-factor nanobeam photonic crystal cavities in bulk silicon carbide

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Greater Than One Billion Q Factor for On-Chip Microresonators

Soliton formation and spectral translation into visible on CMOS-compatible 4H-silicon-carbide-on-insulator platform

High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature