Abstract:Photonic integrated circuits (PICs) based on lithographically patterned waveguides provide a scalable approach for manipulating photonic bits, enabling seminal demonstrations of a wide range of photonic technologies with desired complexity and stability. While the next generation of applications such as ultra-high speed optical transceivers, neuromorphic computing and terabit-scale communications demand further lower power consumption and higher operating frequency. Complementing the leading silicon-based material platforms, the third-generation semiconductor, silicon carbide (SiC), offers a significant opportunity toward the advanced development of PICs in terms of its broadest range of functionalities, including wide bandgap, high optical nonlinearities, high refractive index, controllable artificial spin defects and complementary metal oxide semiconductor-compatible fabrication process. The superior properties of SiC have enabled a plethora of nano-photonic explorations, such as waveguides, micro-cavities, nonlinear frequency converters and optically-active spin defects. This remarkable progress has prompted the rapid development of advanced SiC PICs for both classical and quantum applications. Here, we provide an overview of SiC-based integrated photonics, presenting the latest progress on investigating its basic optoelectronic properties, as well as the recent developments in the fabrication of several typical approaches for light confinement structures that form the basic building blocks for low-loss, multi-functional and industry-compatible integrated photonic platform. Moreover, recent works employing SiC as optically-readable spin hosts for quantum information applications are also summarized and highlighted. As a still-developing integrated photonic platform, prospects and challenges of utilizing SiC material platforms in the field of integrated photonics are also discussed.

Optical parametric oscillation in silicon carbide nanophotonics

Novel Photonic Applications of Silicon Carbide

An integrated 3C-silicon carbide-on-insulator photonic platform for nonlinear and quantum light sources

Silicon Carbide photonic platform based on suspended subwavelength waveguides

Silicon carbide for integrated photonics

Soliton formation and spectral translation into visible on CMOS-compatible 4H-silicon-carbide-on-insulator platform

Pioneering the future with silicon carbide integrated photonics

4H–SiC microring resonators—Opportunities for nonlinear integrated optics

4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics

Inverse-designed Silicon Carbide Quantum and Nonlinear Photonics

Photonic Crystal Optical Parametric Oscillator

Scalable Quantum Photonics with Single Color Centers in Silicon Carbide

Entangled photon pair generation in an integrated SiC platform

Monolithic Silicon Carbide Metalenses

4H-SiC microring opto-mechanical oscillator with a self-injection locked pump

Parametric All-Optical Modulation on Chip

High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature

Quantum Information Processing With Integrated Silicon Carbide Photonics

Two-Emitter Multimode Cavity Quantum Electrodynamics in Thin-Film Silicon Carbide Photonics

Optical single-shot readout of spin qubits in silicon

High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate