Abstract:<p>4H-silicon carbide-on-insulator (4H–SiCOI) serves as a novel and high efficient integration platform for nonlinear optics and quantum photonics. The realization of wafer-scale fabrication of single-crystalline semi-insulating 4H–SiC film on Si (100) substrate using the ion-cutting and layer transferring technique was demonstrated in this work. The thermodynamics of 4H–SiC surface blistering is investigated via observing the blistering phenomenon with a series of implanted fluences and annealing temperatures. Surface tomography and the depth dependent film quality of the 4H–SiC have been extensively studied by employing scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Moreover, X-ray diffraction (XRD) was carried out and the diffraction spectrum reveals a narrow peak with a full width at half maximum (FWHM) of 75.6 arcsec, indicating a good maintenance of the single-crystalline phase for the prepared thin film of 4H–SiC as compared to its bulk counterpart. With the single-crystalline 4H–SiCOI, we have successfully fabricated a micro-ring resonator with a quality factor as high as 6.6 × 10<sup>4</sup>. The reported 4H–SiCOI wafer provides a feasible monolithic platform for integrated photonic applications.</p>

4H-Sic Microring Resonators for Nonlinear Integrated Photonics.

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

4-Quasi-phase-matched Interactions in GaAs Microdisk Cavities.

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

4H–SiC microring resonators—Opportunities for nonlinear integrated optics

Four wave mixing in 3C SiC Ring Resonators

4H-SiC microring opto-mechanical oscillator with a self-injection locked pump

Dense Wavelength Conversion and Multicasting in a Resonance-Split Silicon Microring

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

On-chip Microwave Signal Generation Based on a Silicon Microring Modulator.

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Power-Attenuated Optimization for Four-Wave Mixing-Based Wavelength Conversion in Silicon Nanowire Waveguides

Four-Wave Mixing-Based Wavelength Conversion and Parametric Amplification in Submicron Silicon Core Fibers

Integrated Reconfigurable Microring Based Silicon Wdm Receiver for On-Chip Optical Interconnect

Silicon Photonic Micro-Ring Modulator-based 4 x 112 Gb/s O-band WDM Transmitter with Ring Photocurrent-based Thermal Control in 28nm CMOS

1 Low power continuous-wave nonlinear optics in silica glass integrated waveguide structures

Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices

High-Efficiency Second-Harmonic and Sum-Frequency Generation in a Silicon Nitride Microring Integrated with Few-Layer GaSe

Optical parametric oscillation in silicon carbide nanophotonics