Properties of Directly Electroplated Copper on CoMo Alloy Diffusion Barrier

Xu Wangi,Hyunsuk Kim,Xin-Ping Qu
DOI: https://doi.org/10.1109/icsict.2014.7021188
2014-01-01
Abstract:The properties of directly electroplated Cu on CoMo alloy diffusion barrier were analyzed by FPP, XRD and SEM. Comparison was made between electroplated Cu on CoMo with and without a seed layer. Also, the self-annealing behaviors of both direct electroplated Cu on CoMo and Cu/CoMo were investigated further. Due to the self-annealing process, the defects of directly electroplated Cu on CoMo are recovered resulting in a less resistance difference value between electrochemical deposited (ECD) Cu on CoMo and ECD Cu on Cu/CoMo.
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