Study of A Single Layer Ultrathin Como Film As A Direct Plateable Adhesion/Barrier Layer for Next Generation Interconnect

Xin-Ping Qu,Xu Wang,Li-Ao Cao,Wen-Zhong Xu
DOI: https://doi.org/10.1109/iitc.2014.6831889
2014-01-01
Abstract:In this work, a novel single layer CoMo alloy film is investigated as an excellent adhesion/diffusion barrier to copper metallization. The ultrathin (<;3nm) CoMo film can withstand 400°C/30min annealing on the ULK(k =2.25) and the electrical barrier properties on the p-cap SiO2 structure for the Cu/CoMo can be even better than the Cu/Ta/TaN structure. The CMP of the CoMo film are studied and the direct Cu electroplating on the CoMo film are demonstrated.
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