Electrical modeling, simulation and SPICE model extraction of TSVs in silicon interposer

Xin Sun,Yunhui Zhu,Shenglin Ma,Min Miao,Jing Chen,Yufeng Jin
DOI: https://doi.org/10.1109/EPTC.2011.6184409
2011-01-01
Abstract:In this paper, electrical characteristic of TSV (Through Silicon Via) is analyzed. Firstly, equivalent circuit model of TSV is summarized. Modeling and electrical analysis of TSV is conducted, in which TSVs with ideal and non-ideal profiles are compared. And then, multi-TSV configuration in silicon interposer is modeled and analyzed. Capacitive and inductive coupling between TSVs are simulated. With these analyses, solutions to decrease crosstalk between TSVs are proposed.
What problem does this paper attempt to address?