Frequency- and temperature-dependent modeling of coaxial through-silicon vias for 3-D ICs

Wensheng Zhao,Wenyan Yin,Xiaopeng Wang,XiaoLong Xu
DOI: https://doi.org/10.1109/TED.2011.2162848
IF: 3.1
2011-01-01
IEEE Transactions on Electron Devices
Abstract:Temperature-dependent investigations of circular and square coaxial through-silicon vias (C-TSVs) are carried out in this paper, which can provide an effective solution to suppressing various couplings, such as intra- and intersubstrate, and crosstalk among multi-TSVs. An equivalent lumped-element circuit model is proposed for both C-TSVs, and their parasitic capacitance values, per-unit-height di...
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