Arsenic doping and activations in HgCdTe by MBE

Zhao Zhen-Dian,Chen Lu,Fu Xiang-Liang,Wang Wei-Qiang,Shen Chuan,Zhang Bin,Bu Shun-Dong,Wang Gao,Yang Feng,He Li
DOI: https://doi.org/10.11972/j.issn.1001-9014.2017.05.011
2017-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:The arsenic doping and activations on HgCdTe (mercury cadmium telluride) p(+)-on-n hetero-junctions grown by MBE (molecular beam epitaxy) have got a lot of attention in fabricating high performance long-wavelength IRFPAs (infrared focal plane arrays). In this paper, the performances of HgCdTe diodes with different arsenic doping concentrations are presented. According to the I-V results and dark current mechanism, the effect of arsenic concentration on the trap-assisted tunneling current was calculated and analyzed. To achieve reproducible doping and activation process, the dependence between arsenic doping efficiency and Hg/Te condition was reported. As activation ratio could be higher than 60% under activated annealing at 300, 420 and 240 degree Celsius under an Hg saturated vapor pressure, which was demonstrated by means of Hall-effect measurements and SIMS (Secondary Ion Mass Spectrometry).
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