Molecular Beam Epitaxy of HgCdTe and Related Devices:towards to the 3rd Generation IRFPAs

HE Li,DING Rui-jun,LI Yan-jin,YANG Jian-rong,ZHANG Qin-yao
DOI: https://doi.org/10.3969/j.issn.1001-5078.2005.11.007
2005-01-01
Abstract:Some results on molecular-beam epitaxial growth of HgCdTe focusing on the requirements by the 3~(rd)generation of infrared focal plane arrays are described,and the growth of HgCdTe on GaAs and Si wafers,surface defects as well as p-type doping are addressed.A good composition uniformity was observed over 3-in HgCdTe wafers,the deviation in x was 0.5%.The twins induced by the large lattice mismatch could be depressed by a proper procedure of low temperature nucleation.A typical value of FWHM of(422) x-ray diffraction was found to be 60~80 arc·sec for epilayers grown on GaAs and Si.The averaged density of surface defects of larger than 2μm for 3-in HgCdTe epilayers was obtained to be less than 300 cm~(-2).It was found that the surface sticking coefficient of arsenic during HgCdTe growth was very low and sensitive with temperature,being only about 1×10~(-4) at 170℃.The doped arsenic could be activated into acceptors by a proper condition of thermal annealing.The MBE grown multilayered structures were incorporated into LW n-on-p,p-on-n as well as SW/MW dual color FPA fabrications,and the preliminary results are presented.
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