Research of Arsenic Doping in MBE HgCdTe

WU Yan,WU Jun,WEI Qing-zhu,CHEN Lu,YU Yuan-fang,WANG Yuan-zhang,FU Xiang-liang,QIAO Yi-ming,HE li
DOI: https://doi.org/10.3969/j.issn.1001-5078.2006.11.005
2006-01-01
Abstract:Compared with N-type doping,P-type doping in MBE HgCdTe is more difficult.For Te-rich MBE growth condition,arsenic has more chance gone into cation position than anion,as acts as acceptor only when it gone into Te site.By using arsenic crack cell,we have found the way to achieve P-type doping in 10~(16)~10~(18)cm~(-3) levels.To activate arsenic,the annealing condition was studied,and it was found that arsenic could go into Te site and acts as acceptor only when annealing under mercury pressures.Arsenic diffusion in HgCdTe was also studied.
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