Study of B+ -implanted HgCdTe under rapid thermal annealing

JiaLu Liu,TingQing Zhang,JianHua Feng,Guan Shan Zhou,Mingjiong Ying
DOI: https://doi.org/10.7498/aps.47.47
1998-01-01
Abstract:Hg loss of B+ -implanted HgCdTe with and without a ZnS film under rapid thermal annealing (RTA) has been analysed by secondary ion mass spectroscopy and Auger electron spectroscopy in detail. The temperatures for RTA are 300, 350 and 400 t, and the duration is 10s. The thickness of ZnS film is 160nm. Results obtained show that the surface layer of HgCdTe with a ZnS film does not show Hg loss after RTA (300 °C,10 s). The procedure of RTA for B+-implanted HgCdTe forming N+ -P junction has been optimized. It was shown that RTA carried out after the lithography of the metal electrode can improve the junction characteristics.
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