ENHANCING THE PHOTOLUMINESCENCE OF InAsP/InP STRAINED MULTIPLE QUANTUM WELLS BY H+ IONS IMPLANTATION

Cao Meng,Wu Hui-Zhen,Lao Yan-Feng,Cao Chun-Fang,Liu Cheng
DOI: https://doi.org/10.3321/j.issn:1001-9014.2008.04.017
2008-01-01
Abstract:InAsP/InP strained multiple quantum wells (SMQWs) were grown by gas source molecular beam epitaxy (GSMBE).The effects of H+ ions implantation on the photoluminescence (PL) of InAsP/InP SMQWs and the effects of rapid thermal annealing (RTA) on the PL of implanted InAsP/InP SMQWs were investigated.Our results show that the quantum wells (QWs) PL intensities increase under lower H+ ions implantation energies (doses) and the QWs PL intensities decrease with the rise of implantation energies (doses).During the implantation process,some tunnelling H+ ions annihilate the interface defects inside the QWs and some H+ ions introduce some damage into the QWs structure.The competition between these two processes influences the QWs PL intensities.After RTA,the implanted QWs PL peak positions are blue shifted compared with that of as-grown sample at low temperature 10K and the quantity of blue shift increases with the rise of implantation energies (doses).It is attributed to the defects diffusion and the intermixing of different elements between the well layer and the barrier layer during RTA.
What problem does this paper attempt to address?