Epitaxy and Physical Properties of 1.31μm Vertical Cavity Surface-Emitting Lasers

Huizhen Wu,Zhanchao Huang,Yanfeng Lao
DOI: https://doi.org/10.3969/j.issn.1674-4926.2005.z1.032
2005-01-01
Abstract:Gas source molecular beam epitaxy was used to grow InAsP/InGaAsP strain-compensated multiple quantum wells (MQWs) for 1.31 μm vertical cavity surface emitting lasers on InP substrates and GaAs/AlGaAs distributed Bragg reflectors (DBRs) on GaAs substrates. Then the InAsP/InGaAsP strain-compensated MQWs were directly bonded to DBRs grown on GaAs substrates. Physical properties, such as microstructure and luminescence emission of the bonded structures were investigated. Photoluminescence (PL) characterization showed that 500°C-620°C bonding processes and following removal of InP substrates did not lower the luminescence efficiency of the MQWs. The annealing effect in the bonding process improved the crystalline quality and enhanced the luminescence efficiency. The PL intensity of the MQWs after 620°C annealing is 3 times of the as-grown samples.
What problem does this paper attempt to address?