Thermodynamical Analyses for the Preparation of Si3N4 Powder

WANG Nai-yan,YAO Kui-hong,WO Yin-hua,LI Ye,WANG Yong
DOI: https://doi.org/10.3969/j.issn.1673-3851.2006.03.009
2006-01-01
Abstract:The chemical component,the phase stability and the maximum percent generation of Si_3N_4 powder prepared with several typical Si_3N_4 methods are investigated by using thermodynamic function Δ_rH~0_T,ΔG~0_T,Kp of Si_3N_4 powder preparation,the thermodynamic conditions of gaining high pure,ultra-fine and uniform grain size distributing Si_3N_4 are discussed.The result shows FBR CVD is an important technique for Si_3N_4 powder to present high quality,low energy cost and high production rate in order to industrialize manufacture.
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