Abstract:Silicon oxynitrides (SiOxNy) have many advantageous properties for modern ceramic applications that justify a development of their new and efficient preparation methods. In the paper, we show the possibility of preparing amorphous SiOxNy-based materials from selected liquid organosilicon compounds, methyltrimethoxysilane CH3Si(OCH3)3 and methyltriethoxysilane CH3Si(OC2H5)3, by a convenient spray pyrolysis method. The precursor mist is transported with an inert gas or a mixture of reactive gases through a preheated tube reactor to undergo complex decomposition changes, and the resulting powders are collected in the exhaust filter. The powders are produced at the tube at temperatures of 1200, 1400, and 1600 °C under various gas atmosphere conditions. In the first option, argon Ar gas is used for mist transportation and ammonia NH3 gas serves as a reactive medium, while in the second option nitrogen N2 is exclusively applied. Powder X-Ray Diffraction (XRD) results confirm the highly amorphous nature of all products except those made at 1600 °C in nitrogen. SEM examination shows the spheroidal particle morphology of powders, which is typical for this method. Fourier Transform Infrared (FT-IR) spectroscopy reveals the presence of Si-N and Si-O bonds in the powders prepared under Ar/NH3, whereas those produced under N2 additionally contain Si-C bonds. Raman spectroscopy measurements also support some turbostratic free carbon C in the products prepared under nitrogen. The directly determined O- and N-contents provide additional data linking the process conditions with specific powder composition, especially from the point of view of oxygen replacement in the Si-O moieties formed upon initial precursor decomposition reactions by nitrogen (from NH3 or N2) or carbon (from the carbonization of the organic groups).

Preparation of silicon nitride powder from silica and ammonia

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

Research of Silicon Nitride Powder Prepared by Self-propagating High-temperature Synthesis

Preparation of silicon nitride fibers by additive-assisted nitridation of polysilicon waste powder

Nitridation Of Silicon With Ammonia And Nitrogen

Amorphous Silicon Oxynitride-Based Powders Produced by Spray Pyrolysis from Liquid Organosilicon Compounds

The Role of MgSiN2 During the Sintering Process of Silicon Nitride Ceramic

Synthesis of monodisperse and high-purity α-Si3N4 powder by carbothermal reduction and nitridation

Preparation of high‐purity α‐Si3N4 powder via multifunctional synergistic catalysis and pretreatment method

Thermal Nitridation Kinetics of Silicon Wafers in Nitrogen Atmosphere During Annealing

Combustion Synthesis of MgSiN2 Powders and Si3N4‐MgSiN2 Composite Powders: Effects of Processing Parameters

Efficient Preparation of Si3N4 by Microwave Treatment of Solar-Grade Waste Silicon Powder

Mass Production of Α-Silicon Nitride Single-crystalline Nanowires

Preparation method for producing high purity beta-phase silicon nitride by combustion synthesis method

Preheating-assisted Combustion Synthesis of Β-Si3n4 Powders at Low N2 Pressure

Liquid-Phase-Assisted Catalytic Nitridation of Silicon and In Situ Growth of α-Si3N4

Surface Characterization of Silicon Nitride Powder and Electrokinetic Behavior of Its Aqueous Suspension

Synthesis of alpha-Si3N4 whiskers or equiaxed particles from amorphous Si3N4 powders

Utilization of Silicon Dust to Prepare Si3N4 Used for Steelmaking Additives: Thermodynamics and Kinetics

Novel precursor-derived Al–C–N–(O)-based ceramic additive for the low-temperature pressureless sintering of silicon nitride

Processing of Β‐silicon Nitride from Water‐Based Alpha‐silicon Nitride, Alumina, and Yttria Powder Suspensions