Abstract:Compositional change on the surface of PLD-derived SiC films during vacuum (10−3Pa) annealing was investigated by using Fourier transform-infrared absorption (FT-IR) and X-ray photoelectron spectroscopy (XPS) measurements. The as-deposited film consisted of only a small amount of Si–C bonds, and was abundant in CC component. With an increase in annealing temperature from 800 to 950°C, the amount of SiC bond increased, and the CC component decreased. The films were slightly oxidized by residual O2 at temperatures lower than 950°C. When the temperature reached 1000°C, the amount of SiC bond dropped sharply, accompanied by production of ∼72at.% of SiSi bonds, which was surprisingly high. A model of SiC oxidation based on the loss of C atoms and the formation of SiSi bonds was adopted to explain the experimental results. The activation energy for SiC formation during vacuum annealing was 22.5±2.6kcal/mol, as calculated from the FT-IR data.

Thermal CVD synthesis and characterization of silicon nanopowders

Ultrafast growth of single-crystalline Si nanowires

Studies of synthesizing the SiC nanometer powders by chemical vapor reaction

Thermochemical process occurring in PLD-derived SiC films during vacuum annealing

Crystallization and Disappearance of Defects of the Annealed Silicon Nanowires

The Effect of Silane Flow Rate on Nano-Silicon Powder Production by Silane Thermal CVD

Influence of annealing on microstructures and photoluminescence of nano-composite silicon film

Silicon nano-wires grown at low temperature

Effect of annealing on microstructure and photoluminescence of nano-composite silicon film

Microstructure and Conductivity of Large Area Nanocrystalline Silicon Films Grown by Specially Designed Thermal-Assisted Chemical Vapor Deposition

Crystallization and Raman Shift of Array-Orderly Silicon Nanowires after Annealing at High Temperature

Thermal Decomposition Of The Carbon Nanotube/Sio2 Precursor Powders - Thermal Analysis Coupled With Mass Spectrometry

Sulfide-assisted Growth of Silicon Nano-Wires by Thermal Evaporation of Sulfur Powders

Growth and Mechanical Properties of Amorphous and Nanostructured SiC films

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Tiny silicon nano-wires synthesis on silicon wafers

Synthesis of nanocrystalline silicon carbide powders

Preparation and Photoluminescence of Nanocrystalline Si-Rich Silicon Oxide Films by Pecvd

Thermal decomposition of the carbon nanotube/SiO 2 precursor powders

Thermodynamical Analyses for the Preparation of Si3N4 Powder

Chemical Vapor Deposition of Silicon Nanoparticles on the Surface of Multiwalled Carbon Nanotubes