Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Junjie Niu,Jian Sha,Deren Yang
DOI: https://doi.org/10.1016/j.physe.2004.01.013
2004-01-01
Physica E: Low-Dimensional Systems and Nanostructures
Abstract:A large-scale crystalline silicon nanowires (SiNWs) with a diameter of ∼30nm and length of tens of micrometers on Al2O3 templates and silicon wafers were synthesized by the thermal evaporation of silicon monoxide (SiO). The SiNWs were measured by transmission electron microscopy, scanning electron microscopy, X-ray diffraction and Raman spectroscopy, respectively. It was pointed out that the SiNWs possessed the well crystalline structure. Therefore, it is considered that SiO could be used as Si sources to produce larger-scale SiNWs and crystalline SiNWs may grow from amorphous nuclei.
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