Abstract:Large-scale synthesis of single-crystalline Si nanowires was demonstrated by thermal evaporation of SiO at 1 350 ℃ via chemical vapor deposition(CVD) method.Morphologies and micro-structures of the product were systemically investigated by using X-ray diffraction(XRD),field-effect scanning electron microscopy(FESEM),and transmission electron microscopy(TEM).The as-synthesized Si nanowires had good crystallinity with diameter in the range of 20～80 nm and length from tens of micrometers to hundreds of micrometers.Normally,the Si nanowires were covered by a layer of amorphous Si oxide via oxide-assisted growth(OAG) method.P-type doping to the Si nanowires was accomplished by thermal diffusion of B2O3 at high temperature.Electrical measurements on the single Si nanowires revealed that the conductivity of the nanowires could dramatically increase by B doping from about 10-7 S/cm for the intrinsic Si nanowires to above 0.2 S/cm for the B-doped Si nanowires.Also,the conductivity of the p-type Si nanowires could be precisely controlled by adjusting the diffusion temperature.This method is demonstrated to be simple and effective,which can overcome the difficulty in controlling the electrical properties of Si nanowires grown by OAG,thus offering the opportunities to fabricate high-performance nanodevices based on the p-type Si nanowires.

Nanoscale Silicon Wires Synthesized Using Simple Physical Evaporation

Ultrafast growth of single-crystalline Si nanowires

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Tiny silicon nano-wires synthesis on silicon wafers

Sulfide-assisted Growth of Silicon Nano-Wires by Thermal Evaporation of Sulfur Powders

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Silicon Nanowire Synthesis by Chemical Vapor Deposition

Silicon nano-wires grown at low temperature

A Novel Sulfide-Assisted Growth of Silicon Nano-Wires

Synthesis of Nano-Scale Silicon Wires by Excimer Laser Ablation at High Temperature

A New Route to Large‐Scale Synthesis of Silicon Nanowires in Ultrahigh Vacuum

Ultralong Single Crystal Silicon Nanowires Synthesized by Chemical Vapor Deposition

Synthesis of large areas of highly oriented, very long silicon nanowires

One-dimensional Silicon Nanostructures Fabricated by Thermal Evaporation

Synthesis and Raman Spectra of Si-Nanowires

Synthesis of Ultralong Si3N4 Nanowires by a Simple Thermal Evaporation Method

Fabrication of large-scale, layer-deposited, low oxygen-content and uniform silicon nanowires

Large-scale Synthesis of Silicon Nanowires by Thermal Evaporation of Silicon Monoxide and Controlled P-Type Doping