Abstract:We report the nanocluster-catalyzed growth of ultralong and highly uniform single-crystalline silicon nanowires (SiNWs) with millimeter-scale lengths and aspect ratios up to approximately 100,000. The average SiNW growth rate using disilane (Si 2H 6) at 400 degrees C was 31 microm/min, while the growth rate determined for silane (SiH 4) reactant under similar growth conditions was 130 times lower. Transmission electron microscopy studies of millimeter-long SiNWs with diameters of 20-80 nm show that the nanowires grow preferentially along the 110 direction independent of diameter. In addition, ultralong SiNWs were used as building blocks to fabricate one-dimensional arrays of field-effect transistors (FETs) consisting of approximately 100 independent devices per nanowire. Significantly, electrical transport measurements demonstrated that the millimeter-long SiNWs had uniform electrical properties along the entire length of wires, and each device can behave as a reliable FET with an on-state current, threshold voltage, and transconductance values (average +/-1 standard deviation) of 1.8 +/- 0.3 microA, 6.0 +/- 1.1 V, 210 +/- 60 nS, respectively. Electronically uniform millimeter-long SiNWs were also functionalized with monoclonal antibody receptors and used to demonstrate multiplexed detection of cancer marker proteins with a single nanowire. The synthesis of structurally and electronically uniform ultralong SiNWs may open up new opportunities for integrated nanoelectronics and could serve as unique building blocks linking integrated structures from the nanometer through millimeter length scales.

Ultralong Single Crystal Silicon Nanowires Synthesized by Chemical Vapor Deposition

Ultrafast growth of single-crystalline Si nanowires

Tiny silicon nano-wires synthesis on silicon wafers

Silicon Nanowire Synthesis by Chemical Vapor Deposition

Silicon nano-wires grown at low temperature

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Synthesis of Ultralong Si3N4 Nanowires by a Simple Thermal Evaporation Method

Synthesis of Centimeter-Scale Ultra-Long Sic Nanowires by Simple Catalyst-Free Chemical Vapor Deposition

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Controlled synthesis of millimeter-long silicon nanowires with uniform electronic properties.

Synthesis and characterization of ultra-long straight carbon wires

Array-orderly single crystalline silicon nano-wires

Silicon Quantum-Wires Arrays Synthesized by Chemical Vapor Deposition and Its Micro-Structural Properties

Ultra-long SiC Nanowires Synthesized by a Simple Method

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Growth and Characterization of Aligned Ultralong and Diameter-Controlled Silicon Nanotubes by Hot Wire Chemical Vapor Deposition Using Electrospun Poly(Vinyl Pyrrolidone) Nanofiber Template

Centimeter-Long Single-Crystalline Si Nanowires

Ultra Long SiCN Nanowires and SiCN/SiO2 Nanocables: Synthesis, Characterization, and Electrical Property.

Nanoscale Silicon Wires Synthesized Using Simple Physical Evaporation

Synthesis and Characterization of Ultra-Long Silica Nanowires