Crystallization and Disappearance of Defects of the Annealed Silicon Nanowires

JJ Niu,H Sha,YW Wang,XY Ma,DR Yang
DOI: https://doi.org/10.1016/s0167-9317(03)00026-1
IF: 2.3
2003-01-01
Microelectronic Engineering
Abstract:The crystallization and the disappearance of the defects and impurity stress of silicon nanowires (SiNWs) after annealing at high temperature (900°C) have been investigated. The chemical-vapor-deposition (CVD) and alumina template technology were used for the synthesis of the SiNWs. Then transmission electron microscopy (TEM), selected-area electron diffraction (SAED) and photoluminescence (PL) spectra were used to study the crystallization procedure and the disappearance of defects of the SiNWs.
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