The Effect of Silane Flow Rate on Nano-Silicon Powder Production by Silane Thermal CVD

WANG Xin-yan,JIN Da-lai,MA Zhao-jun,WANG Yong,YAO Kui-hong

DOI: https://doi.org/10.3969/j.issn.1673-3851.2007.05.009

2007-01-01

Abstract:There are many different kinds of methods to produce nano-silicon powder.Compared to these methods,method of thermal CVD has many advantages.It is successfully synthesized with this method.The effect of silane flux on nano-silicon powder production is studied.The silicon powder was characterized by XRD,SEM,LASER PARTICLE SIZE ANALYZER,which is produced under condition of certain temperature and pressure with the change of flux.The optimal processing parameter is obtained and will be helpful in large scale industry application.