Analysis and Verification of Silicon Nitride Super-micro Powder Synthesis with FBR-CVD Technique

WANG Yong,ZHOU Jun,WANG Xin-yan,YAO Kui-hong
DOI: https://doi.org/10.3969/j.issn.1673-3851.2007.01.009
2007-01-01
Abstract:The process of silicon nitride super-micro powders synthesis are studied,especially of its thermodynamic and kinetics behavior,the critical factors for synthesis of silicon nitride powders in the fluidized bed have been discussed.The super-micro powders were successfully synthesized via chemical vapor deposition using silane and ammonia as reactants in a two-stage fluidized bed reactor,which were tested of nano scale,well uniformity and high purity.Furthermore,the optimal processing parameters presented in this paper will be contributed to following industrialization.The method provides a promising synthesis route for silicon nitride nanopowders.
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