Electrical And Optical Properties Of Phosphorus-Doped P-Type Zno Films Grown By Metalorganic Chemical Vapor Deposition

X. H. Pan,J. Jiang,Y. J. Zeng,H. P. He,L. P. Zhu,Z. Z. Ye,B. H. Zhao,X. Q. Pan
DOI: https://doi.org/10.1063/1.2828017
IF: 2.877
2008-01-01
Journal of Applied Physics
Abstract:P-doped p-type ZnO thin films have been grown by metalorganic chemical vapor deposition. By modulating the P evaporating temperature, p-type conductivity can be controlled due to the different P content incorporated into the ZnO films. The P-doped p-type ZnO thin films are of high optical quality, as indicated by low-temperature photoluminescence. P-related acceptor state with an energy level of 163 meV is identified from free-to-neutral-acceptor transitions. In addition, x-ray photoelectron spectroscopy confirms that only one chemical bonding state of P exists in the P-doped ZnO thin films. (C) 2008 American Institute of Physics.
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