Influence of Microstructures of Fe Catalyst Film on Growth of Aligned Carbon Nanotubes

LIU Hua-ping,CHENG Guo-an,ZHAO Yong,ZHENG Rui-ting,LIANG Chang-lin
DOI: https://doi.org/10.3969/j.issn.1000-985x.2005.04.025
2005-01-01
Abstract:Aligned carbon nanotubes were synthesized on Si substrates deposited with 5-10nm Fe films using thermal chemical vapor deposition method. And the effects of NH_3 pretreatment on Fe films and subsequent growth of carbon nanotubes were investigated. The results indicate that an appropriate time of NH_3 pretreatment can not only etch Fe particles, but also promote the catalytic properties of Fe catalyst. Subsequently, high purity and well-aligned carbon nanotubes were obtained.
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