J2240204 Evaluation of the Properties and Alignment of Carbon Nanotube Sheet Grown by CVD Method

Tomoki NAKAGAWA,Atsushi HOSOI,Yang JU
DOI: https://doi.org/10.1299/jsmemecj.2014._j2240204-
2014-01-01
Abstract:Fabrication of aligned carbon nanotubes (CNTs) is needed in order to secure the performance of CNTs. Therefore we fabricate Aligned CNTs by controlling the heating time and the flow rate of the gas and fabricate CNTs by thermal chemical vapor deposition (CVD). We observe surface of CNTs and Fe nanoparticles on the Si substrate by scanning electron microscope (SEM). Dispersion of Fe nanoparticles as the catalyst is important to make the aligned CNT. As heating rate improve the dispersion of the Fe nanoparticles on Si substrate, and effect the growth of CNTs. The density of Fe nanoparticles was improved to be 2.76×10^<11> counts/cm^2 . The particle size distribution was improved to 10〜30nm from 10〜200nm. The nanoparticles that have narrow particle size distribution make high aligned CNT array.
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