Microstructure Control of Fe Catalyst Films for the Growth of Multiwalled Carbon Nanotube Arrays

Guo-an Cheng,Hua-ping Liu,Rui-ting Zheng,Yong Zhao,Chang-lin Liang
2008-01-01
Journal of the Korean Physical Society
Abstract:Fe catalyst films were deposited on silicon substrates by using a metal vapor vacuum arc (MEVVA) ion deposition system for the growth of aligned multiwalled carbon nanotubes. The effects of deposition angle and film thickness on the morphologies of catalyst films before and after thermal treatment were investigated. The results show that the uniformities of both 5-nm and 10-nm films are enhanced as the deposition angle decreases. With increase from 5 nm to 10 nm, the surface uniformities of pristine films prepaxed at higher deposition angles (60 degrees and 90 degrees) are increased, while that of the films produced at 30 degrees deposition angle is slightly decreased. The uniformity of Fe catalyst particle sizes after thermal treatment on the whole, clearly decreases as the thickness is increased from 5 nm to 10 nm in the case of the same deposition angle. 5-nm films deposited at 30 degrees deposition angle show the most uniform features before and after thermal treatment and can be used for the synthesis of high-quality carbon nanotube arrays.
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