Structural and Photoluminescence Properties of Er2O3Films by Sol-Gel Method

王兴军,董斌,周治平
DOI: https://doi.org/10.3788/gzxb20103907.1213
2010-01-01
Abstract:In order to resolve the low Er3+ concentration problem in Er3+ doped Si based light source,the Er2O3 films with high Er3+ concentration and strong 1.535 μm room photoluminescence are fabricated at 900 ℃ on Si(100)and SiO2/Si(100)substrates,respectively,by using the sol-gel spin coating method.Small thermal quenching of 1/5 is observed.PL intensity increases 2~3 times on SiO2/Si substrate compared with that on Si substrate.Er2O3 structure is single cubic.The Er2O3 films with strong PL intensity are promising candidates for application in Si-based light source and amplifier.
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